Customization:	Available
After-sales Service:	1 Year
Warranty:	1 Year

Overview
Product Description
Product Parameters
Detailed Photos

Basic Info.

Model NO.

LS AFM

Magnification

>1000X

Type

Video

Number of Cylinder

Binoculars

Mobility

Desktop

Stereoscopic Effect

Kind of Light Source

Ordinary Light

Shape

Single-lens

Usage

Teaching

Principle

Optics

Principle of Optics

Polarizing Microscope

Sample Size

Φ≤90mm,H≤20mm

Max. Scan Range

X/Y: 20 Um, Z: 2 Um

Resolution

X/Y:160;0.2 Nm, Z: 0.05nm

Scan Rate

0.6Hz~4.34Hz

Feedback Type

DSP Digital Feedback

PC Connection

USB2.0

Windows

Compatible with Windows98/2000/XP/7/8

Scan Angle

Random

Sample Movement

0~20mm

Data Points

256×256,512×512

Transport Package

Carton and Wooden

Specification

55 lbs

Trademark

flyingman

Origin

China

HS Code

9011800090

Production Capacity

100pieces/Month

Product Description

Suzhou FlyingMan Precision Instruments Co., Ltd. offers a cutting-edge Biological Microscope System tailored for the Semiconductor Wafer industry. This advanced microscope system provides high-resolution microscopy for wafer analysis, ensuring precise semiconductor inspection and analysis.

Features

The first large-scale industrial atomic force microscope in China to achieve commercial production

Sample size and weight are almost unlimited, making it suitable for testing large samples such as wafers, ultra-large gratings, and optical glass

Sample stage has strong expandability and is convenient for multi-instrument combination for in-situ detection

One-click automatic scanning, capable of programming multiple test points for fast and automated detection

Keeps the sample stationary while scanning the image and drives the probe to perform XYZ 3D motion measurement imaging

Gantry scanning head design, marble base, vacuum adsorption stage

Integrated mechanical vibration damping and environmental noise shielding solutions greatly reduce system noise levels

Intelligent and fast needle insertion method for automatic detection of piezoelectric ceramics under motor control, protecting probes and samples

Scanner nonlinear correction user editor, with nano characterization and measurement accuracy better than 98%

Software

Two kinds of sampling pixel to choose from: 256x256, 512x512

Execute scan area move and cut function, choose any interesting area of the sample

Scan sample in random angle at the beginning

Adjust the laser spot detection system in real-time

Choose and set different colors of scanning image in palette

Support linear average and offset calibration in real-time for sample title

Support scanner sensitivity calibration and electronic controller auto-calibration

Support offline analysis and process of sample image

Company name: 'Suzhou FlyingMan Precision Instruments Co., Ltd.'

Biological Microscope System for Semiconductor Wafer

Working mode	Contact mode, Tapping mode	Z Lifting table	Stepper motor drive control with a minimum step size of 10nm
Optional mode	Friction force/lateral force, amplitude/phase,magnetic force/electrostatic force	Z Lifting stroke	20mm (optional 25mm)
Force spectrum curve	F-Z force curve, RMS-Z curve	Optical positioning	10X optical objective
XYZ Scanning method	Probe driven XYZ scanning	Camera	5 megapixel digital CMOS
XY Scanning Range	Greater than 100um×100um	Scan rate	0.6Hz~30Hz
Z Scan angle	Greater than 10um	Scan angle	0~360°
Scanning resolution	Horizontal 0.2nm, vertical 0.05nm	Operating environment	Windows 10 operating system
XY Sample Stage	Stepper motor drive control, with a movement accuracy of 1um	Communication interface	USB2.0/3.0
XY Shift motion	200×200mm(Optional 300×300mm)	Instrument structure	Gantry scanning head, marble base
Sample loading platform	Dia 200mm(Optional 300mm)	Damping method	Air floating shock absorption acoustic shielding cover (optional active shock absorption platform)
Sample Weight	≤20Kg